- EFEM front-end interface Bridges the factory material transport system and the process tool's internal transfer environment for standardized wafer hand-off.
- SEMI-compatible design Presented as an interface system compatible with SEMI standards for equipment communication and integration.
- Dual-arm transfer robot A dual-arm robot with an external axis provides high-efficiency wafer movement at the tool front end.
- Compact footprint Small-footprint architecture suits space-constrained fab tool front ends.
- Flexible transport coordination Moves wafers manually or in coordination with factory transport such as overhead systems.
- Contamination control Supports repeatable wafer transfers while reducing operator contact with critical substrates.
Description
The SIASUN TSS-3000 is an EFEM (Equipment Front End Module) for semiconductor manufacturing, serving as the controlled interface between a fab's material transport system and a process tool's internal transfer environment. It coordinates wafer loading, alignment and hand-off while helping maintain contamination control and standardized, SEMI-compatible equipment communication. Designed with a small footprint, the TSS-3000 uses a dual-arm transfer robot with an external axis to move wafers manually or in coordination with factory transport such as overhead systems, supporting high-efficiency, repeatable wafer handling at the tool front end. It is suited to cleanroom wafer-fab environments where standardized interfaces and reduced operator contact with critical substrates are required. Contact us for pricing and availability.
Features
Specs
| Brand | SIASUN |
|---|---|
| Model | TSS-3000 |
| Robot type | EFEM (Equipment Front End Module) / front-end wafer transfer system |
| Interface | SEMI-compatible front-end interface |
| Transfer robot | Dual-arm robot with an external axis |
| Footprint | Compact / small footprint |
| Operation | Manual or coordinated with factory transport (e.g. overhead systems) |
| Typical applications | Wafer-fab front-end handling, wafer loading and alignment/hand-off |
Industries
Frequently Asked Questions
Contact us for current pricing, availability and a tailored quote on the SIASUN Truss Robot.
It is a Cartesian gantry robot for repeatable material handling, most commonly CNC machine loading and unloading, inter-operation transfers and process automation lines on the factory floor.
Yes. With its wide working envelope and scalable rail length, a single truss robot can service multiple CNC machines or workstations, reducing the number of standalone handling devices.
Its end-effector interface accepts pneumatic or servo grippers, vacuum cups, magnetic grippers and tool changers, so it can be configured for parts handling, flat or ferrous surfaces and multi-operation cells.
Yes. Robotix Market supplies businesses worldwide with invoicing and after-sales support. Contact us for a quote.
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